Issued Patents All Time
Showing 51–65 of 65 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10626500 | Showerhead design | Chaitanya A. PRASAD, Kevin Joseph Bautista, Jeffrey Tobin, Umesh M. Kelkar, Lara Hawrylchak | 2020-04-21 |
| 10619235 | Effective and novel design for lower particle count and better wafer quality by diffusing the flow inside the chamber | Vishwas Kumar Pandey, Edric Tong, Prashanth Vasudeva | 2020-04-14 |
| D877784 | Plasma outlet liner | Dongming Iu, Yanjun Xia | 2020-03-10 |
| 10519547 | Susceptor design to eliminate deposition valleys in the wafer | Karthik Ramanathan, Nyi O. Myo, Schubert S. Chu, Jeffrey Tobin, Errol Antonio C. Sanchez +1 more | 2019-12-31 |
| 10458040 | Upper dome with injection assembly | Paul Brillhart, Anzhong Chang, Edric Tong, Kin Pong Lo, James Francis Mack +5 more | 2019-10-29 |
| 10325763 | Physical vapor deposition processing systems target cooling | Wei Wang, Vishwas Kumar Pandey | 2019-06-18 |
| 10269614 | Susceptor design to reduce edge thermal peak | Schubert S. Chu, Anhthu Ngo, Karthik Ramanathan, Nitin Pathak, Nyi O. Myo +8 more | 2019-04-23 |
| 10232324 | Gas mixing apparatus | Kalyanjit Ghosh, Scott McClelland | 2019-03-19 |
| 10221483 | Showerhead design | Chaitanya A. PRASAD, Kevin Joseph Bautista, Jeffrey Tobin, Umesh M. Kelkar, Lara Hawrylchak | 2019-03-05 |
| 10132003 | Heating modulators to improve epi uniformity tuning | Shu-Kwan LAU, Surajit Kumar, Joseph M. Ranish, Zhiyuan Ye, Mehmet Tugrul Samir +1 more | 2018-11-20 |
| 10062598 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2018-08-28 |
| 10047457 | EPI pre-heat ring | Shu-Kwan LAU | 2018-08-14 |
| 10000847 | Graphite susceptor | Preetham Rao, Subramani Iyer, Mehran Behdjat | 2018-06-19 |
| 9845550 | Upper dome with injection assembly | Paul Brillhart, Anzhong Chang, Edric Tong, Kin Pong Lo, James Francis Mack +5 more | 2017-12-19 |
| 9111980 | Gas exhaust for high volume, low cost system for epitaxial silicon deposition | David K. Carlson, Michael R. Rice, Kashif Maqsood, Pravin K. Narwankar | 2015-08-18 |