Issued Patents All Time
Showing 26–50 of 100 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11682576 | Pedestal heater for spatial multi-wafer processing tool | Tejas Ulavi, Dhritiman Subha Kashyap | 2023-06-20 |
| 11623253 | In-situ DC plasma for cleaning pedestal heater | Tejas Ulavi, Arkaprava Dan, Wei V. Tang | 2023-04-11 |
| 11599069 | Method for auto-tuning and process performance assessment of chamber control | Mauro Cimino, Arkaprava Dan | 2023-03-07 |
| 11602064 | Dynamic electrical and fluid delivery system with indexing motion for batch processing chambers | Akshay Gunaji, Uday Pai, Timothy J. Roggenbuck, Kalesh Panchaxari Karadi, Tejas Ulavi | 2023-03-07 |
| 11586789 | Machine learning based smart process recipe builder to improve azimuthal flow and thickness uniformity | Dhritiman Subha Kashyap, Chaowei Wang, Kartik Shah, Kevin Griffin, Karthik Ramanathan +2 more | 2023-02-21 |
| 11583816 | Gas distribution plate for thermal deposition | Jared Ahmad Lee, Joseph AuBuchon, Dhritiman Subha Kashyap, Michael R. Rice | 2023-02-21 |
| 11584993 | Thermally uniform deposition station | Jared Ahmad Lee, Joseph AuBuchon, Kenneth Brian Doering, Dhritiman Subha Kashyap, Kartik Shah | 2023-02-21 |
| 11549183 | Showerhead with inlet mixer | Ashutosh Agarwal, Dhritiman Subha Kashyap, Kartik Shah, Yanjun Xia | 2023-01-10 |
| 11532462 | Method and system for cleaning a process chamber | Kalyanjit Ghosh, Shailendra Srivastava, Tejas Ulavi, Yusheng Zhou, Amit Kumar BANSAL | 2022-12-20 |
| 11520358 | Gas-pulsing-based shared precursor distribution system and methods of use | Michael R. Rice, Joseph AuBuchon, Ashley M. Okada, Alexander Fernandez, Ming Xu +4 more | 2022-12-06 |
| 11512391 | Process kit for a high throughput processing chamber | Kalyanjit Ghosh, Mayur Govind Kulkarni, Kien N. Chuc, Sungjin Kim, Yanjie Wang | 2022-11-29 |
| 11508611 | Enhanced lift pin design to eliminate local thickness non-uniformity in teos oxide films | Kalyanjit Ghosh, Mayur Govind Kulkarni, Praket P. Jha, Krishna Nittala | 2022-11-22 |
| 11501957 | Pedestal support design for precise chamber matching and process control | Gopu Krishna, Alexander S. Polyak | 2022-11-15 |
| 11479857 | Clean isolation valve for reduced dead volume | Ashutosh Agarwal | 2022-10-25 |
| 11479855 | Spatial wafer processing with improved temperature uniformity | Joseph AuBuchon, Dhritiman Subha Kashyap, Jared Ahmad Lee, Tejas Ulavi, Michael R. Rice | 2022-10-25 |
| 11434569 | Ground path systems for providing a shorter and symmetrical ground path | Tuan Nguyen, Jason M. Schaller, Edward P. Hammond, IV, David Blahnik, Tejas Ulavi +3 more | 2022-09-06 |
| 11430686 | Pedestal heater for spatial multi-wafer processing tool | Tejas Ulavi, Dhritiman Subha Kashyap | 2022-08-30 |
| 11396703 | Apparatus and methods for improving chemical utilization rate in deposition process | Kevin Griffin, Joseph AuBuchon, Mario David Silvetti, Hari Ponnekanti | 2022-07-26 |
| 11332827 | Gas distribution plate with high aspect ratio holes and a high hole density | Sumit Agarwal, Chad Peterson, Michael R. Rice | 2022-05-17 |
| 11293099 | Showerhead assembly with multiple fluid delivery zones | Amit Kumar BANSAL, Juan Carlos Rocha-Alvarez, Sam Kim, Tuan Nguyen | 2022-04-05 |
| 11282676 | Paired dynamic parallel plate capacitively coupled plasmas | Hari Ponnekanti, Tsutomu Tanaka, Mandyam Sriram, Dmitry A. Dzilno, Mario David Silvetti | 2022-03-22 |
| 11260432 | In-situ DC plasma for cleaning pedestal heater | Tejas Ulavi, Arkaprava Dan, Wei V. Tang | 2022-03-01 |
| 11220747 | Complementary pattern station designs | Joseph AuBuchon, Michael R. Rice, Arkaprava Dan, Hanhong Chen | 2022-01-11 |
| 11169547 | Gas-pulsing-based shared precursor distribution system and methods of use | Michael R. Rice, Joseph AuBuchon, Ashley M. Okada, Alexander Fernandez, Ming Xu +4 more | 2021-11-09 |
| 11133210 | Dual temperature heater | Dale R. Du Bois, Juan Carlos Rocha-Alvarez, Ganesh Balasubramanian, Lipyeow Yap, Jianhua Zhou +1 more | 2021-09-28 |