| 11110425 |
Gas distribution plate for thermal deposition |
Jared Ahmad Lee, Joseph AuBuchon, Dhritiman Subha Kashyap, Michael R. Rice |
2021-09-07 |
| 11098404 |
Multi-station chamber lid with precise temperature and flow control |
Dhritiman Subha Kashyap, Gopu Krishna, Michael R. Rice |
2021-08-24 |
| 11047043 |
Chamber liner for high temperature processing |
Ren-Guan Duan, Kalyanjit Ghosh |
2021-06-29 |
| 11017986 |
Deposition radial and edge profile tunability through independent control of TEOS flow |
Yi Yang, Truong Van Nguyen, Nattaworn Boss Nunta, Joseph AuBuchon, Tuan Nguyen +1 more |
2021-05-25 |
| 10910243 |
Thermal management system |
Tejas Ulavi, Dhritiman Subha Kashyap |
2021-02-02 |
| 10910238 |
Heater pedestal assembly for wide range temperature control |
Kaushik Alayavalli, Ajit Balakrishna, Amit Kumar BANSAL, Matthew J. Busche, Juan Carlos Rocha-Alvarez +3 more |
2021-02-02 |
| 10787739 |
Spatial wafer processing with improved temperature uniformity |
Joseph AuBuchon, Dhritiman Subha Kashyap, Jared Ahmad Lee, Tejas Ulavi, Michael R. Rice |
2020-09-29 |
| 10724138 |
Process kit for a high throughput processing chamber |
Kalyanjit Ghosh, Mayur Govind Kulkarni, Kien N. Chuc, Sungjin Kim, Yanjie Wang |
2020-07-28 |
| 10720349 |
Temperature measurement in multi-zone heater |
Dale R. Du Bois, Bozhi Yang, Jianhua Zhou, Amit Kumar BANSAL, Juan Carlos Rocha-Alvarez |
2020-07-21 |
| 10669629 |
Showerhead assembly with multiple fluid delivery zones |
Amit Kumar BANSAL, Juan Carlos Rocha-Alvarez, Sam Kim, Tuan Nguyen |
2020-06-02 |
| 10636628 |
Method for cleaning a process chamber |
Kalyanjit Ghosh, Shailendra Srivastava, Tejas Ulavi, Yusheng Zhou, Amit Kumar BANSAL |
2020-04-28 |
| 10612135 |
Method and system for high temperature clean |
Kalyanjit Ghosh, Ren-Guan Duan, Mayur Govind Kulkarni, Gregory Siu, Praket P. Jha +4 more |
2020-04-07 |
| 10600624 |
System and method for substrate processing chambers |
Kalyanjit Ghosh, Mayur Govind Kulkarni, Shailendra Srivastava, Tejas Ulavi, Yusheng Zhou +9 more |
2020-03-24 |
| 10570517 |
Apparatus and method for UV treatment, chemical treatment, and deposition |
Amit Kumar BANSAL, Dale R. Du Bois, Juan Carlos Rocha-Alvarez, Scott A. Hendrickson, Thomas Nowak |
2020-02-25 |
| 10518418 |
Wafer swapper |
Dale R. Du Bois, Juan Carlos Rocha-Alvarez, Karthik Janakiraman, Hari Ponnekanti, Prajeeth Wilton |
2019-12-31 |
| 10490436 |
Enhanced lift pin design to eliminate local thickness non-uniformity in teos oxide films |
Kalyanjit Ghosh, Mayur Govind Kulkarni, Praket P. Jha, Krishna Nittala |
2019-11-26 |
| 10480068 |
Chamber liner for high temperature processing |
Ren-Guan Duan, Kalyanjit Ghosh |
2019-11-19 |
| 10483282 |
VNAND tensile thick TEOS oxide |
Michael Wenyoung Tsiang, Praket P. Jha, Xinhai Han, Bok Hoen Kim, Sang Hyuk Kim +8 more |
2019-11-19 |
| 10325799 |
Dual temperature heater |
Dale R. Du Bois, Juan Carlos Rocha-Alvarez, Ganesh Balasubramanian, Lipyeow Yap, Jianhua Zhou +1 more |
2019-06-18 |
| 10312076 |
Application of bottom purge to increase clean efficiency |
Kalyanjit Ghosh, Mayur Govind Kulkarni |
2019-06-04 |
| 10233543 |
Showerhead assembly with multiple fluid delivery zones |
Amit Kumar BANSAL, Juan Carlos Rocha-Alvarez, Sam Kim, Tuan Nguyen |
2019-03-19 |
| 10199388 |
VNAND tensile thick TEOS oxide |
Michael Wenyoung Tsiang, Praket P. Jha, Xinhai Han, Bok Hoen Kim, Sang Hyuk Kim +8 more |
2019-02-05 |
| 10153185 |
Substrate temperature measurement in multi-zone heater |
Dale R. Du Bois, Bozhi Yang, Jianhua Zhou, Amit Kumar BANSAL, Juan Carlos Rocha-Alvarez |
2018-12-11 |
| 10113231 |
Process kit including flow isolator ring |
Dale R. DuBois, Kalyanjit Ghosh, Kien N. Chuc, Mayur Govind Kulkarni, Yanjie Wang +1 more |
2018-10-30 |
| 10017855 |
Process kit for a high throughput processing chamber |
Kalyanjit Ghosh, Mayur Govind Kulkarni, Kien N. Chuc, Sungjin Kim, Yanjie Wang |
2018-07-10 |
