Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 12009228 | Low temperature chuck for plasma processing systems | Toan Q. Tran, Zilu Weng, Dmitry Lubomirsky, Satoru Kobayashi, Tae Seung Cho +2 more | 2024-06-11 | $84,570,000 |
| 11594428 | Low temperature chuck for plasma processing systems | Toan Q. Tran, Zilu Weng, Dmitry Lubomirsky, Satoru Kobayashi, Tae Seung Cho +2 more | 2023-02-28 | $49,197,000 |
| 11533783 | Multi-zone heater model-based control in semiconductor manufacturing | Mauro Cimino, Don Channa Kaluarachchi, Ramyashree Vishnuprasad, Dmitry Lubomirsky | 2022-12-20 | $39,023,000 |
| 6822185 | Temperature controlled dome-coil system for high power inductively coupled plasma systems | Michael Welch, Paul Luscher, Siamak Salimian, Rolf Guenther, Zhong Qiang Hua +1 more | 2004-11-23 | $17,815,000 |
| 6246203 | Direct skew control and interlock of gantry | Rexford Abbott | 2001-06-12 |