Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11533783 | Multi-zone heater model-based control in semiconductor manufacturing | Mauro Cimino, Son M. Phi, Ramyashree Vishnuprasad, Dmitry Lubomirsky | 2022-12-20 |
| 11049755 | Semiconductor substrate supports with embedded RF shield | David Benjaminson, Michael H. Grace, Soonam Park, Dmitry Lubomirsky, Jaeyong Cho +1 more | 2021-06-29 |