Low temperature chuck for plasma processing systems

Assignee

• Applied Materials

Inventors

• Toan Q. Tran (34 patents)
• Zilu Weng (4 patents)
• Dmitry Lubomirsky (223 patents)
• Satoru Kobayashi (169 patents)
• Tae Seung Cho (21 patents)
• Soonam Park (77 patents)
• Son M. Phi (5 patents)
• Shankar Venkataraman (108 patents)

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