Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11791190 | Apparatus and methods for real-time wafer chucking detection | Tejas Ulavi, Arkaprava Dan, Sanjeev Baluja | 2023-10-17 |
| 11081318 | Geometrically selective deposition of dielectric films utilizing low frequency bias | Kenichi Ohno, Keiichi Tanaka, Li-Qun Xia, Tsutomu Tanaka, Dmitry A. Dzilno +4 more | 2021-08-03 |