Issued Patents All Time
Showing 26–37 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10787739 | Spatial wafer processing with improved temperature uniformity | Sanjeev Baluja, Dhritiman Subha Kashyap, Jared Ahmad Lee, Tejas Ulavi, Michael R. Rice | 2020-09-29 |
| 10249479 | Magnet configurations for radial uniformity tuning of ICP plasmas | Tza-Jing Gung, Travis Koh, Nattaworn Boss Nunta, Sheng-Chin Kung, Steven Lane +2 more | 2019-04-02 |
| 10115566 | Method and apparatus for controlling a magnetic field in a plasma chamber | Steven Lane, Tza-Jing Gung, Kartik Ramaswamy, Travis Koh, Yang Yang | 2018-10-30 |
| 9779953 | Electromagnetic dipole for plasma density tuning in a substrate processing chamber | Tza-Jing Gung, Samer Banna | 2017-10-03 |
| 9659751 | System and method for selective coil excitation in inductively coupled plasma processing reactors | Kartik Ramaswamy, Yang Yang, Steven Lane, Lawrence Wong, Travis Koh | 2017-05-23 |
| 9613783 | Method and apparatus for controlling a magnetic field in a plasma chamber | Steven Lane, Tza-Jing Gung, Kartik Ramaswamy, Travis Koh, Yang Yang | 2017-04-04 |
| 9418890 | Method for tuning a deposition rate during an atomic layer deposition process | Paul F. Ma, Jiang Lu, Mei Chang | 2016-08-16 |
| 9252024 | Deposition chambers with UV treatment and methods of use | Hyman Lam, Nicholas R. Denny, Mei Chang | 2016-02-02 |
| 9209074 | Cobalt deposition on barrier surfaces | Jiang Lu, Hyoung-Chan Ha, Paul F. Ma, Seshadri Ganguli, Sang Ho Yu +1 more | 2015-12-08 |
| 9051641 | Cobalt deposition on barrier surfaces | Jiang Lu, Hyoung-Chan Ha, Paul F. Ma, Seshadri Ganguli, Sang Ho Yu +1 more | 2015-06-09 |
| 8491967 | In-situ chamber treatment and deposition process | Paul F. Ma, Mei Chang, Steven H. Kim, Dien-Yeh Wu, Norman Nakashima +2 more | 2013-07-23 |
| 7780789 | Vortex chamber lids for atomic layer deposition | Dien-Yeh Wu, Puneet Bajaj, Xiaoxiong Yuan, Steven H. Kim, Schubert S. Chu +1 more | 2010-08-24 |