Issued Patents All Time
Showing 26–50 of 81 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11462426 | Methods and assemblies for gas flow ratio control | Kevin Brashear, Ashley M. Okada, Dennis L. Demars, Jaidev Rajaram, Marcel E. Josephson | 2022-10-04 |
| 11261538 | In-situ temperature mapping for epi chamber | Ala Moradian, Zuoming ZHU, Patricia M. Liu, Shu-Kwan LAU, Flora Fong-Song CHANG +1 more | 2022-03-01 |
| 11195914 | Transistor and method for forming a transistor | Patricia M. Liu, Flora Fong-Song CHANG | 2021-12-07 |
| 11177144 | Wafer spot heating with beam width modulation | Shu-Kwan LAU, Zuoming ZHU, Koji Nakanishi, Toshiyuki Nakagawa, Nyi O. Myo +1 more | 2021-11-16 |
| 11171023 | Diode laser for wafer heating for EPI processes | Schubert S. Chu, Douglas E. Holmgren, Kartik Shah, Palamurali GAJENDRA, Nyi O. Myo +5 more | 2021-11-09 |
| 11029297 | Method of gas composition determination, adjustment, and usage | — | 2021-06-08 |
| 11021795 | Multi zone spot heating in epi | Shu-Kwan LAU, Koji Nakanishi, Toshiyuki Nakagawa, Zuoming ZHU, Joseph M. Ranish +3 more | 2021-06-01 |
| 10943803 | Methods and assemblies for gas flow ratio control | Kevin Brashear, Ashley M. Okada, Dennis L. Demars, Jaidev Rajaram, Marcel E. Josephson | 2021-03-09 |
| 10930543 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2021-02-23 |
| 10866135 | Methods, systems, and apparatus for mass flow verification based on rate of pressure decay | Justin Hough, Marcel E. Josephson | 2020-12-15 |
| 10770319 | EPI thickness tuning by pulse or profile spot heating | Shu-Kwan LAU, Zuoming ZHU, Nyi O. Myo, Errol Antonio C. Sanchez, Schubert S. Chu | 2020-09-08 |
| 10731272 | Methods and apparatus for deposition processes | Nyi O. Myo, Kevin Joseph Bautista, Schubert S. Chu, Yihwan Kim | 2020-08-04 |
| 10727093 | Light pipe window structure for low pressure thermal processes | Paul Brillhart, Joseph M. Ranish, Aaron Muir Hunter, Edric Tong, James Francis Mack +3 more | 2020-07-28 |
| 10684159 | Methods, systems, and apparatus for mass flow verification based on choked flow | Kevin Brashear, Justin Hough, Jaidev Rajaram, Marcel E. Josephson, Ashley M. Okada | 2020-06-16 |
| 10458040 | Upper dome with injection assembly | Paul Brillhart, Anzhong Chang, Edric Tong, Kin Pong Lo, James Francis Mack +5 more | 2019-10-29 |
| 10453721 | Methods and assemblies for gas flow ratio control | Kevin Brashear, Ashley M. Okada, Dennis L. Demars, Jaidev Rajaram, Marcel E. Josephson | 2019-10-22 |
| 10440253 | Focusing method and terminal | Jian Wang | 2019-10-08 |
| 10276688 | Selective process for source and drain formation | Xinyu BAO, Flora Fong-Song CHANG, Abhishek Dube, Xuebin Li, Errol Antonio C. Sanchez +2 more | 2019-04-30 |
| 10269600 | Methods and assemblies for gas flow ratio control | Kevin Brashear, Ashley M. Okada, Dennis L. Demars, Jaidev Rajaram, Marcel E. Josephson | 2019-04-23 |
| 10260164 | Methods and apparatus for deposition processes | Nyi O. Myo, Kevin Joseph Bautista, Schubert S. Chu, Yihwan Kim | 2019-04-16 |
| 10256322 | Co-doping process for n-MOS source drain application | Xinyu BAO, Hua Chung | 2019-04-09 |
| 10224421 | Self-aligned process for sub-10nm fin formation | Xinyu BAO, Chun Yan, Hua Chung, Schubert S. Chu, Satheesh Kuppurao | 2019-03-05 |
| 10132003 | Heating modulators to improve epi uniformity tuning | Shu-Kwan LAU, Surajit Kumar, Joseph M. Ranish, Kartik Shah, Mehmet Tugrul Samir +1 more | 2018-11-20 |
| 10125415 | Structure for relaxed SiGe buffers including method and apparatus for forming | Errol Antonio C. Sanchez, Keun-Yong Ban, Xinyu BAO | 2018-11-13 |
| 10062598 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2018-08-28 |