Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7807984 | Ion implanters | Gregory Robert Alcott, Adrian Murrell, Matthew Castle | 2010-10-05 |
| 7659184 | Plasma immersion ion implantation process with chamber seasoning and seasoning layer plasma discharging for wafer dechucking | Manoj Vellaikal, Kartik Santhanam, Yen B. Ta, Matthew D. Scotney-Castle, Canfeng Lai +2 more | 2010-02-09 |