Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Ion implanters

Ion implanters

US Patent 7807984 · Granted Oct 5, 2010

Estimated economic value: $8,418,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Methods for detection using optical emission spectroscopy2025
Skip slot box blanks, boxes and methods of forming the same2025
Chamber moisture control using narrow optical filters measuring emission lines2025
Method and hardware for post maintenance vacuum recovery system2024
Multi-thermal CVD chambers with shared gas delivery and exhaust system2024
Method and system for foreline deposition diagnostics and control2024
Enhanced process and hardware architecture to detect and correct realtime produc2023
Fluid container cap with dual-position restrictor2023
Fluid dosing system2023
Rapid chamber vacuum leak check hardware and maintenance routine2023
Diode laser for wafer heating for EPI processes2021
Temperature controlled remote plasma clean for exhaust deposit removal2019