Diode laser for wafer heating for EPI processes

Assignee

• Applied Materials

Inventors

• Schubert S. Chu (79 patents)
• Douglas E. Holmgren (16 patents)
• Kartik Shah (68 patents)
• Palamurali GAJENDRA (2 patents)
• Nyi O. Myo (45 patents)
• Preetham Rao (16 patents)
• Kevin Joseph Bautista (17 patents)
• Zhiyuan Ye (82 patents)
• Martin A. Hilkene (28 patents)
• Errol Antonio C. Sanchez (98 patents)
• Richard O. Collins (20 patents)

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