Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11923169 | Apparatus and method for metal contamination control in an ion implantation system using charge stripping mechanism | Causon Ko-Chuan Jen, Shu Satoh, Genise Bonacorsi | 2024-03-05 |
| 9455116 | Angular scanning using angular energy filter | Causon Ko-Chuan Jen | 2016-09-27 |
| 7462844 | Method, system, and apparatus for improving doping uniformity in high-tilt ion implantation | Shengwu Chang, Isao Tsunoda, Nobihiro Tokoro, Dennis Rodier, Joseph C. Olson +2 more | 2008-12-09 |