Ion beam angle calibration and emittance measurement system for ribbon beams

Assignee

• Axcelis Technologies

Inventors

• Marvin Farley (41 patents)
• Donald N. Polner (5 patents)
• Geoffrey Ryding (54 patents)
• Theodore H. Smick (50 patents)
• Takao Sakase (31 patents)
• Ronald Horner (13 patents)
• Edward C. Eisner (25 patents)
• Paul Eide (7 patents)
• Brian S. Freer (11 patents)
• Mark Lambert (6 patents)
• Donovan Beckel (3 patents)

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