Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9714474 | Seed layer deposition in microscale features | Arthur Keigler, Johannes Chiu, Daniel Goodman | 2017-07-25 |
| 9453290 | Apparatus for fluid processing a workpiece | Arthur Keigler, John Harrell, Qunwei Wu | 2016-09-27 |
| 8512543 | Method for fluid processing a workpiece | Arthur Keigler, John Harrell, Qunwei Wu | 2013-08-20 |
| 8277624 | Method and apparatus for fluid processing a workpiece | Arthur Keigler, John Harrell, Qunwei Wu | 2012-10-02 |
| 8168057 | Balancing pressure to improve a fluid seal | Arthur Keigler, Qunwei Wu, John Harrell | 2012-05-01 |
| 8038856 | Method and apparatus for fluid processing a workpiece | Arthur Keigler, John Harrell, Qunwei Wu | 2011-10-18 |
| 7727366 | Balancing pressure to improve a fluid seal | Arthur Keigler, Qunwei Wu, John Harrell | 2010-06-01 |
| 7722747 | Method and apparatus for fluid processing a workpiece | Arthur Keigler, John Harrell, Qunwei Wu | 2010-05-25 |
| 7445697 | Method and apparatus for fluid processing a workpiece | Arthur Keigler, John Harrell, Qunwei Wu | 2008-11-04 |