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Apparatus for fluid processing a workpiece |
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| 8277624 |
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2012-10-02 |
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Balancing pressure to improve a fluid seal |
Arthur Keigler, Qunwei Wu, Zhenqiu Liu |
2012-05-01 |
| 8038856 |
Method and apparatus for fluid processing a workpiece |
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| 7727366 |
Balancing pressure to improve a fluid seal |
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2010-06-01 |
| 7722747 |
Method and apparatus for fluid processing a workpiece |
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Method and apparatus for fluid processing a workpiece |
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| 5839870 |
Transfer system for use with a horizontal furnace |
George E. Niemirowski, Adam F. Niemirowski, P. V. Patel |
1998-11-24 |
| 5775752 |
Holder for semiconductor wafer cassettes |
George E. Niemirowski, Adam F. Niemirowski |
1998-07-07 |