Issued Patents All Time
Showing 26–37 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8420981 | Apparatus for thermal processing with micro-environment | Daniel Goodman, David G. Guarnaccia, Matthew R. Jeffers | 2013-04-16 |
| 8277624 | Method and apparatus for fluid processing a workpiece | John Harrell, Zhenqiu Liu, Qunwei Wu | 2012-10-02 |
| 8168057 | Balancing pressure to improve a fluid seal | Qunwei Wu, Zhenqiu Liu, John Harrell | 2012-05-01 |
| 8038856 | Method and apparatus for fluid processing a workpiece | John Harrell, Zhenqiu Liu, Qunwei Wu | 2011-10-18 |
| 7727366 | Balancing pressure to improve a fluid seal | Qunwei Wu, Zhenqiu Liu, John Harrell | 2010-06-01 |
| 7722747 | Method and apparatus for fluid processing a workpiece | John Harrell, Zhenqiu Liu, Qunwei Wu | 2010-05-25 |
| 7445697 | Method and apparatus for fluid processing a workpiece | John Harrell, Zhenqiu Liu, Qunwei Wu | 2008-11-04 |
| 7100954 | Ultra-thin wafer handling system | Martin Klein, David Felsenthal | 2006-09-05 |
| 7067045 | Method and apparatus for sealing electrical contacts during an electrochemical deposition process | Harald Herchen, Vincent E. Burkhart, Son Trinh | 2006-06-27 |
| 6540899 | Method of and apparatus for fluid sealing, while electrically contacting, wet-processed workpieces | — | 2003-04-01 |
| 6251250 | Method of and apparatus for controlling fluid flow and electric fields involved in the electroplating of substantially flat workpieces and the like and more generally controlling fluid flow in the processing of other work piece surfaces as well | — | 2001-06-26 |
| 6174011 | Method of and apparatus for handling thin and flat workpieces and the like | — | 2001-01-16 |