Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9710903 | System and method for detecting design and process defects on a wafer using process monitoring features | Christophe David Fouquet, Zain Saidin, Sergio Edelstein, Carl Hess | 2017-07-18 |
| 6632124 | Optical monitoring in a two-step chemical mechanical polishing process | Bret W. Adams, Boguslaw A. Swedek, Rajeev Bajaj, Andreas Norbert Wiswesser, Stan Tsai +3 more | 2003-10-14 |
| 6506097 | Optical monitoring in a two-step chemical mechanical polishing process | Bret W. Adams, Boguslaw A. Swedek, Rajeev Bajaj, Andreas Norbert Wiswesser, Stan Tsai +3 more | 2003-01-14 |