Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10296681 | Process based metrology target design | Guangqing Chen, Eric Kent, Yen-Wen Lu, Paul Anthony Tuffy, Jen-Shiang Wang +3 more | 2019-05-21 |
| 10007744 | Process based metrology target design | Guangqing Chen, Eric Kent, Yen-Wen Lu, Paul Anthony Tuffy, Jen-Shiang Wang +3 more | 2018-06-26 |
| 9494874 | Method and apparatus for design of a metrology target | Guangqing Chen, Jen-Shiang Wang | 2016-11-15 |
| 8192669 | Methods for fabricating large area nanoimprint molds | Stephen Y. Chou, Can PENG, Wendi Li | 2012-06-05 |
| 7317739 | Mode-locked laser using a mode-locking wavelength selective reflector | Stephen Y. Chou, Allan Chang, Hua Tan, Jian Jim Wang | 2008-01-08 |