Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10296692 | Method and apparatus for design of a metrology target | Guangqing Chen, David Harold Whysong | 2019-05-21 |
| 8423928 | System and method for model based multi-patterning optimization | Abdurrahman Sezginer | 2013-04-16 |
| 8069423 | System and method for model based multi-patterning optimization | Abdurrahman Sezginer | 2011-11-29 |