Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7030984 | Fast wafer positioning method for optical metrology | Martin Ebert | 2006-04-18 |
| 6747746 | System and method for finding the center of rotation of an R-theta stage | Martin Ebert | 2004-06-08 |