{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Wafer chuck with integrated reference sample", "item": "https://www.patentleaderboard.com/patent/6952258"}]}
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Home › Wafer chuck with integrated reference sample

Wafer chuck with integrated reference sample

US Patent 6952258 · Granted Oct 4, 2005

Estimated economic value: $517,000 ⓘ

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