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Home › System and method for finding the center of rotation of an R-theta stage

System and method for finding the center of rotation of an R-theta stage

US Patent 6747746 · Granted Jun 8, 2004

Estimated economic value: $3,053,000 ⓘ

Assignee

Therma-Wave

Inventors

Ilya Chizhov (2 patents)
Martin Ebert (28 patents)

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