Issued Patents All Time
Showing 1–25 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10113861 | Optical system and methods for the determination of stress in a substrate | — | 2018-10-30 |
| 9329224 | Optical testing of a multi quantum well semiconductor device | — | 2016-05-03 |
| 9041931 | Substrate analysis using surface acoustic wave metrology | Michael Colgan, Michael Kotelyanskii, Christopher Morath | 2015-05-26 |
| 8567253 | Opto-acoustic methods and apparatus for performing high resolution acoustic imaging and other sample probing and modification operations | Arto Nurmikko | 2013-10-29 |
| 8537363 | Picosecond ultrasonic system incorporating an optical cavity | — | 2013-09-17 |
| 8302480 | Enhanced ultra-high resolution acoustic microscope | Arto Nurmikko | 2012-11-06 |
| 7894070 | Optical method and system for the characterization of laterally-patterned samples in integrated circuits | — | 2011-02-22 |
| 7782471 | Optical method for the characterization of laterally-patterned samples in integrated circuits | — | 2010-08-24 |
| 7624640 | Opto-acoustic methods and apparatus for performing high resolution acoustic imaging and other sample probing and modification operations | Arto Nurmikko | 2009-12-01 |
| 7505154 | Optical method for the characterization of laterally patterned samples in integrated circuits | — | 2009-03-17 |
| 7339676 | Optical method and system for the characterization of laterally-patterned samples in integrated circuits | — | 2008-03-04 |
| 6563591 | Optical method for the determination of grain orientation in films | — | 2003-05-13 |
| 6512586 | Ultrasonic generator and detector using an optical mask having a grating for launching a plurality of spatially distributed, time varying strain pulses in a sample | — | 2003-01-28 |
| 6400449 | Optical stress generator and detector | Robert J. Stoner | 2002-06-04 |
| 6381019 | Ultrasonic generator and detector using an optical mask having a grating for launching a plurality of spatially distributed, time varying strain pulses in a sample | — | 2002-04-30 |
| 6321601 | Optical method for the characterization of laterally-patterned samples in integrated circuits | — | 2001-11-27 |
| 6317216 | Optical method for the determination of grain orientation in films | — | 2001-11-13 |
| 6271921 | Optical stress generator and detector | Robert J. Stoner | 2001-08-07 |
| 6211961 | Optical method for the characterization of the electrical properties of semiconductors and insulating films | — | 2001-04-03 |
| 6208421 | Optical stress generator and detector | Robert J. Stoner | 2001-03-27 |
| 6208418 | Apparatus and method for measurement of the mechanical properties and electromigration of thin films | — | 2001-03-27 |
| 6191855 | Apparatus and method for the determination of grain size in thin films | — | 2001-02-20 |
| 6175416 | Optical stress generator and detector | Robert J. Stoner | 2001-01-16 |
| 6087242 | Method to improve commercial bonded SOI material | Devendra K. Sadana | 2000-07-11 |
| 6038026 | Apparatus and method for the determination of grain size in thin films | — | 2000-03-14 |