Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6274495 | Method for fabricating a device on a substrate | Panya Wongsenakhum, William Messner, Edward J. Nagy, William Starks, Mehrdad M. Moslehi | 2001-08-14 |
| 6221217 | Physical vapor deposition system having reduced thickness backing plate | Mehrdad M. Moslehi, Dorian Heimanson, Cecil J. Davis | 2001-04-24 |
| 6190732 | Method and system for dispensing process gas for fabricating a device on a substrate | Panya Wongsenakhum, William Messner, Edward J. Nagy, William Starks, Mehrdad M. Moslehi | 2001-02-20 |
| 5950723 | Method of regulating substrate temperature in a low pressure environment | Dorian Heimanson | 1999-09-14 |
| 5876573 | High magnetic flux cathode apparatus and method for high productivity physical-vapor deposition | Mehrdad M. Moslehi, Dorian Heimanson, Cecil J. Davis | 1999-03-02 |
| 5775416 | Temperature controlled chuck for vacuum processing | Dorian Heimanson | 1998-07-07 |
| 5746897 | High magnetic flux permanent magnet array apparatus and method for high productivity physical vapor deposition | Dorian Heimanson, Mehrdad M. Moslehi, Paul E. Spronz | 1998-05-05 |
| 5663098 | Method for deposition of a conductor in integrated circuits | J. Randall Creighton, Frank Dominguez, A. Wayne Johnson | 1997-09-02 |