Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8853080 | Method for depositing tungsten film with low roughness and low resistivity | Yan Guan, Deqi Wang, Feng Chen, Raashina Humayun | 2014-10-07 |
| 8551885 | Method for reducing tungsten roughness and improving reflectivity | Feng Chen, Raashina Humayun | 2013-10-08 |
| 8262800 | Methods and apparatus for cleaning deposition reactors | Panya Wongsenakhum | 2012-09-11 |