| 11901227 |
Feature fill with nucleation inhibition |
Anand Chandrashekar, Raashina Humayun, Michal Danek, Juwen Gao, Deqi Wang |
2024-02-13 |
| 11410883 |
Tungsten feature fill with nucleation inhibition |
Anand Chandrashekar, Raashina Humayun, Michal Danek, Juwen Gao, Deqi Wang |
2022-08-09 |
| 11075115 |
Tungsten feature fill |
Anand Chandrashekar, Raashina Humayun, Michal Danek, Juwen Gao, Deqi Wang |
2021-07-27 |
| 10580695 |
Feature fill with nucleation inhibition |
Anand Chandrashekar, Raashina Humayun, Michal Danek, Juwen Gao, Deqi Wang |
2020-03-03 |
| 10256142 |
Tungsten feature fill with nucleation inhibition |
Anand Chandrashekar, Raashina Humayun, Michal Danek, Juwen Gao, Deqi Wang |
2019-04-09 |
| 10103058 |
Tungsten feature fill |
Anand Chandrashekar, Raashina Humayun, Michal Danek, Juwen Gao, Deqi Wang |
2018-10-16 |
| 9997405 |
Feature fill with nucleation inhibition |
Anand Chandrashekar, Raashina Humayun, Michal Danek, Juwen Gao, Deqi Wang |
2018-06-12 |
| 9653353 |
Tungsten feature fill |
Anand Chandrashekar, Raashina Humayun, Michal Danek, Juwen Gao, Deqi Wang |
2017-05-16 |
| 9240347 |
Tungsten feature fill |
Anand Chandrashekar, Raashina Humayun, Michal Danek, Juwen Gao, Deqi Wang |
2016-01-19 |
| 8883637 |
Systems and methods for controlling etch selectivity of various materials |
Anand Chandrashekar, Raashina Humayun, Michal Danek, Ronald A. Powell |
2014-11-11 |
