Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12077858 | Tungsten deposition | Pragna Nannapaneni, Novy Tjokro, Sema Ermez, Ruopeng Deng, Xiaolan Ba +1 more | 2024-09-03 |
| 12060639 | Rapid flush purging during atomic layer deposition | Pragna Nannapaneni, Sema Ermez, Novy Tjokro, Ruopeng Deng, Xiaolan Ba +2 more | 2024-08-13 |
| 11972952 | Atomic layer deposition on 3D NAND structures | Ruopeng Deng, Xiaolan Ba, Yu-Hao Pan, Juwen Gao | 2024-04-30 |
| 9349637 | Method for void-free cobalt gap fill | Jeong-Seok Na, Michal Danek, Sanjay Gopinath | 2016-05-24 |