Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10229826 | Systems and methods for forming low resistivity metal contacts and interconnects by reducing and removing metallic oxide | Shruti Vivek Thombare, Jeong-Seok Na, Raashina Humayun, Chiukin Steven Lai | 2019-03-12 |
| 9748137 | Method for void-free cobalt gap fill | Chiukin Steven Lai, Jeong-Seok Na, Raashina Humayun, Michal Danek | 2017-08-29 |
| 7790633 | Sequential deposition/anneal film densification method | George D. Papasouliotis, Ron Rulkens, Dennis M. Hausmann, Jeff Tobin, Adrianne K. Tipton +1 more | 2010-09-07 |
| 7678709 | Method of forming low-temperature conformal dielectric films | Brian Lu, Wai-Fan Yau, Collin Kwok Leung Mui, Bunsen B. Nie | 2010-03-16 |
| 7482247 | Conformal nanolaminate dielectric deposition and etch bag gap fill process | George D. Papasouliotis, Ron Rulkins, Dennis M. Hausmann, Jeff Tobin, Adrianne K. Tipton +5 more | 2009-01-27 |
| 7297608 | Method for controlling properties of conformal silica nanolaminates formed by rapid vapor deposition | George D. Papasouliotis, Ron Rulkens, Dennis M. Hausmann, Jeff Tobin, Adrianne K. Tipton +1 more | 2007-11-20 |
| 7294583 | Methods for the use of alkoxysilanol precursors for vapor deposition of SiO2 films | Ron Rulkens, George D. Papasouliotis, Dennis M. Hausmann, Bunsen B. Nie, Adrianne K. Tipton +1 more | 2007-11-13 |
| 7271112 | Methods for forming high density, conformal, silica nanolaminate films via pulsed deposition layer in structures of confined geometry | George D. Papasouliotis, Adrianne K. Tipton, Ron Rulkens, Dennis M. Hausmann, Jeff Tobin | 2007-09-18 |
| 7223707 | Dynamic rapid vapor deposition process for conformal silica laminates | George D. Papasouliotis, Jeff Tobin, Ron Rulkens, Dennis M. Hausmann, Adrianne K. Tipton +1 more | 2007-05-29 |
| 7202185 | Silica thin films produced by rapid surface catalyzed vapor deposition (RVD) using a nucleation layer | Dennis M. Hausmann, Jeff Tobin, George D. Papasouliotis, Ron Rulkens, Adrianne K. Tipton +1 more | 2007-04-10 |
| 7148155 | Sequential deposition/anneal film densification method | George D. Papasouliotis, Ron Rulkens, Dennis M. Hausmann, Jeff Tobin, Adrianne K. Tipton +1 more | 2006-12-12 |
| 7129189 | Aluminum phosphate incorporation in silica thin films produced by rapid surface catalyzed vapor deposition (RVD) | Dennis M. Hausmann, Adrianne K. Tipton, Bunsen B. Nie, George D. Papasouliotis, Ron Rulkens | 2006-10-31 |
| 7097878 | Mixed alkoxy precursors and methods of their use for rapid vapor deposition of SiO2 films | Ron Rulkens, Dennis M. Hausmann, George D. Papasouliotis, Bunsen B. Nie, Adrianne K. Tipton +1 more | 2006-08-29 |
| 6846745 | High-density plasma process for filling high aspect ratio structures | George D. Papasouliotis, Vishal Gauri, Vikram Singh | 2005-01-25 |