Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6689249 | Shield or ring surrounding semiconductor workpiece in plasma chamber | Bryan Pu, Hongching Shan, James C. Wang, Henry Fong, Zongyu LI +1 more | 2004-02-10 |
| 6284093 | Shield or ring surrounding semiconductor workpiece in plasma chamber | Bryan Pu, Hongching Shan, James C. Wang, Henry Fong, Zongyu LI +1 more | 2001-09-04 |
| 6113731 | Magnetically-enhanced plasma chamber with non-uniform magnetic field | Hongching Shan, Roger Alan Lindley, Claes Bjorkman, Xue-Yu Qian, Richard W. Plavidal +4 more | 2000-09-05 |
| 5989349 | Diagnostic pedestal assembly for a semiconductor wafer processing system | Roger Alan Lindley, Hongching Shan, Richard R. Mett | 1999-11-23 |
| 5740009 | Apparatus for improving wafer and chuck edge protection | Bryan Pu, Hongching Shan, Michael Welch, Semyon Sherstinsky, Alfred Mak +4 more | 1998-04-14 |