Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6689249 | Shield or ring surrounding semiconductor workpiece in plasma chamber | Kuang-Han Ke, Bryan Pu, Hongching Shan, James C. Wang, Henry Fong +1 more | 2004-02-10 |
| 6284093 | Shield or ring surrounding semiconductor workpiece in plasma chamber | Kuang-Han Ke, Bryan Pu, Hongching Shan, James C. Wang, Henry Fong +1 more | 2001-09-04 |
| 6284149 | High-density plasma etching of carbon-based low-k materials in a integrated circuit | Karsten Schneider, Axel Walter, Jian Ding | 2001-09-04 |
| 6168726 | Etching an oxidized organo-silane film | Jian Ding, Mehul Naik | 2001-01-02 |
| 6113731 | Magnetically-enhanced plasma chamber with non-uniform magnetic field | Hongching Shan, Roger Alan Lindley, Claes Bjorkman, Xue-Yu Qian, Richard W. Plavidal +4 more | 2000-09-05 |