Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6689249 | Shield or ring surrounding semiconductor workpiece in plasma chamber | Kuang-Han Ke, Bryan Pu, Hongching Shan, James C. Wang, Zongyu LI +1 more | 2004-02-10 |
| 6440864 | Substrate cleaning process | Thomas J. Kropewnicki, Jeremiah T. Pender, Charles Peter Auglis, Raymond Hung, Hongqing Shan | 2002-08-27 |
| 6326307 | Plasma pretreatment of photoresist in an oxide etch process | Roger Alan Lindley, Yunsang Kim, Takehito Komatsu, Ajey M. Joshi, Bryan Pu +1 more | 2001-12-04 |
| 6284093 | Shield or ring surrounding semiconductor workpiece in plasma chamber | Kuang-Han Ke, Bryan Pu, Hongching Shan, James C. Wang, Zongyu LI +1 more | 2001-09-04 |
| 5801065 | Structure and fabrication of semiconductor device having merged resistive/capacitive plate and/or surface layer that provides ESD protection | Wajid H. Rizvi, Murali K. Denduluri, Greg Anzelc, Rahul Shinkre, Daniel Ho | 1998-09-01 |