Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10053778 | Cooling pedestal with coating of diamond-like carbon | Vijay D. Parkhe, Kurt J. Ahmann, Steve Sansoni | 2018-08-21 |
| 8852348 | Heat exchange pedestal with coating of diamond-like material | Vijay D. Parkhe, Kurt J. Ahmann, Steve Sansoni | 2014-10-07 |
| 7824498 | Coating for reducing contamination of substrates during processing | Vijay D. Parkhe, Kurt J. Ahmann, Steve Sansoni | 2010-11-02 |
| 6485603 | Method and apparatus for conserving energy within a process chamber | Nelson Yee | 2002-11-26 |