{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Dynamic electrical and fluid delivery system with indexing motion for batch processing chambers", "item": "https://www.patentleaderboard.com/patent/11602064"}]}

Home › Dynamic electrical and fluid delivery system with indexing motion for batch processing chambers

Dynamic electrical and fluid delivery system with indexing motion for batch processing chambers

US Patent 11602064 · Granted Mar 7, 2023

Estimated economic value: $32,704,000 ⓘ

Assignee

Applied Materials

Inventors

Akshay Gunaji (4 patents)
Uday Pai (9 patents)
Timothy J. Roggenbuck (2 patents)
Sanjeev Baluja (104 patents)
Kalesh Panchaxari Karadi (2 patents)
Tejas Ulavi (24 patents)

View full patent text on Google Patents →