Issued Patents All Time
Showing 26–50 of 86 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11370079 | Reinforcement ring for carrier head with flexible membrane | Jamie Stuart Leighton | 2022-06-28 |
| 11338409 | Three-zone carrier head and flexible membrane | Jamie Stuart Leighton | 2022-05-24 |
| 11260500 | Retaining ring with shaped surface | Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more | 2022-03-01 |
| 11241769 | Methods and apparatus for profile and surface preparation of retaining rings utilized in chemical mechanical polishing processes | David Masayuki Ishikawa, Garrett H. Sin, Charles C. Garretson, Huanbo Zhang, Chia-Ling PAI +2 more | 2022-02-08 |
| 11056350 | Retaining ring having inner surfaces with facets | Steven M. Zuniga, Andrew J. Nagengast, Samuel Chu-Chiang Hsu, Gautam Shashank Dandavate | 2021-07-06 |
| 11011356 | Sputtering target with backside cooling grooves | Brian T. West, Michael S. Cox | 2021-05-18 |
| 10832931 | Electrostatic chuck with embossed top plate and cooling channels | Chethan Mangalore, Arumuga Balan | 2020-11-10 |
| 10766117 | Retaining ring with shaped surface | Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more | 2020-09-08 |
| 10714321 | Sputtering target with backside cooling grooves | Brian T. West, Michael S. Cox | 2020-07-14 |
| 10702971 | Textured membrane for a multi-chamber carrier head | Tsz-Sin Siu, Hung Chih Chen, Andrew J. Nagengast, Steven M. Zuniga, Thomas Brezoczky | 2020-07-07 |
| 10610994 | Polishing system with local area rate control and oscillation mode | Eric Lau, Hui Chen, King Yi Heung, Chih Chung Chou, Edwin C. Suarez +2 more | 2020-04-07 |
| 10589399 | Textured small pad for chemical mechanical polishing | Edwin C. Suarez, Jason Garcheung Fung, Eric Lau, King Yi Heung, Ashwin CHOCKALINGAM +3 more | 2020-03-17 |
| 10562147 | Polishing system with annular platen or polishing pad for substrate monitoring | Paul D. Butterfield, Thomas H. Osterheld, Shou-Sung Chang, Steven M. Zuniga, Fred C. Redeker | 2020-02-18 |
| 10532441 | Three-zone carrier head and flexible membrane | Jamie Stuart Leighton | 2020-01-14 |
| 10500695 | Retaining ring having inner surfaces with features | Steven Mark Reedy, Simon Yavelberg, Steven M. Zuniga, Andrew J. Nagengast, Samuel Chu-Chiang Hsu +1 more | 2019-12-10 |
| 10478937 | Acoustic emission monitoring and endpoint for chemical mechanical polishing | Jianshe Tang, David Masayuki Ishikawa, Benjamin Cherian, Thomas H. Osterheld | 2019-11-19 |
| 10434623 | Local area polishing system and polishing pad assemblies for a polishing system | Eric Lau, Hui Chen, King Yi Heung, Wei-Cheng Lee, Chih Chung Chou +3 more | 2019-10-08 |
| 10344375 | Gas cooled substrate support for stabilized high temperature deposition | Brian T. West, Michael S. Cox | 2019-07-09 |
| 10322492 | Retaining ring for CMP | Andrew J. Nagengast, Christopher Heung-Gyun Lee, Thomas Li, Anand N. Iyer, Jie Diao +3 more | 2019-06-18 |
| 10252397 | Methods and apparatus for profile and surface preparation of retaining rings utilized in chemical mechanical polishing processes | David Masayuki Ishikawa, Garrett H. Sin, Charles C. Garretson, Huanbo Zhang, Chia-Ling PAI +2 more | 2019-04-09 |
| 10236198 | Methods for the continuous processing of substrates | Banqiu Wu, Nag B. Patibandla, Toshiaki Fujita, Ralf Hofmann, Pravin K. Narwankar +2 more | 2019-03-19 |
| 10049863 | Sputtering target with backside cooling grooves | Brian T. West, Michael S. Cox | 2018-08-14 |
| 9937601 | Retaining ring with Shaped Surface | Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more | 2018-04-10 |
| 9850576 | Anti-arc zero field plate | Jonghoon Baek, Edwin C. Suarez, Tsutomu Tanaka, Edward P. Hammond, IV | 2017-12-26 |
| 9842841 | Semiconductor device and method of fabricating the same | Ji Hun Kim, Ilgweon Kim, Junhwa Song, Wonseok Yoo, Eun-Sun Lee | 2017-12-12 |