Issued Patents All Time
Showing 76–86 of 86 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7749052 | Carrier head using flexure restraints for retaining ring alignment | Jin Yi, Hung Chih Chen, Samuel Chu-Chiang | 2010-07-06 |
| 7727055 | Flexible membrane for carrier head | Steven M. Zuniga, Andrew J. Nagengast | 2010-06-01 |
| 7699688 | Carrier ring for carrier head | Steven M. Zuniga, Andrew J. Nagengast | 2010-04-20 |
| 7654888 | Carrier head with retaining ring and carrier ring | Steven M. Zuniga, Andrew J. Nagengast | 2010-02-02 |
| 7575504 | Retaining ring, flexible membrane for applying load to a retaining ring, and retaining ring assembly | Steven M. Zuniga, Andrew J. Nagengast | 2009-08-18 |
| 7527271 | Fast substrate loading on polishing head without membrane inflation step | Andrew J. Nagengast, Steven M. Zuniga, Hung Chih Chen | 2009-05-05 |
| 7503837 | Composite retaining ring | Hung Chih Chen, Thomas Brezoczky, Douglas R. McAllister, David Datong Huo | 2009-03-17 |
| 7255771 | Multiple zone carrier head with flexible membrane | Hung Chih Chen, Tsz-Sin Siu, Thomas Brezoczky, Steven M. Zuniga | 2007-08-14 |
| 7198561 | Flexible membrane for multi-chamber carrier head | Hung Chih Chen, Steven M. Zuniga | 2007-04-03 |
| 7186171 | Composite retaining ring | Hung Chih Chen, Thomas Brezoczky, Douglas R. McAllister, David Datong Huo | 2007-03-06 |
| 6974371 | Two part retaining ring | Hung Chih Chen, Steven M. Zuniga, Robert D. Tolles | 2005-12-13 |