Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7749052 | Carrier head using flexure restraints for retaining ring alignment | Jin Yi, Jeonghoon Oh, Hung Chih Chen | 2010-07-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7749052 | Carrier head using flexure restraints for retaining ring alignment | Jin Yi, Jeonghoon Oh, Hung Chih Chen | 2010-07-06 |