Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10832931 | Electrostatic chuck with embossed top plate and cooling channels | Chethan Mangalore, Jeonghoon Oh | 2020-11-10 |
AB
Arumuga Balan
Overall (All Time): #2,826,239 of 4,157,543Top 70%
1
Patents All Time