Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12341032 | Methods of selective oxidation on rapid thermal processing (RTP) chamber with active steam generation | Chaitanya A. PRASAD, Christopher S. Olsen, Lara Hawrylchak, Daniel C. Glover, Naman Apurva +1 more | 2025-06-24 |
| 12139790 | Processing system and method of delivering a reactant gas | Vishwas Kumar Pandey, Christopher S. Olsen, Rene George, Eric Kihara Shono, Lara Hawrylchak +3 more | 2024-11-12 |
| 11996305 | Selective oxidation on rapid thermal processing (RTP) chamber with active steam generation | Chaitanya A. PRASAD, Christopher S. Olsen, Lara Hawrylchak, Daniel C. Glover, Naman Apurva +1 more | 2024-05-28 |
| 11959169 | Asymmetric injection for better wafer uniformity | Eric Kihara Shono, Vishwas Kumar Pandey, Christopher S. Olsen, Kartik Shah, Hansel LO +3 more | 2024-04-16 |
| 11486038 | Asymmetric injection for better wafer uniformity | Eric Kihara Shono, Vishwas Kumar Pandey, Christopher S. Olsen, Kartik Shah, Hansel LO +3 more | 2022-11-01 |
| 11322347 | Conformal oxidation processes for 3D NAND | Johanes F. Swenberg, Taewan Kim, Christopher S. Olsen | 2022-05-03 |
| 11081340 | Argon addition to remote plasma oxidation | Hansel LO, Christopher S. Olsen, Eric Kihara Shono, Johanes S. Swenberg, Taewan Kim +1 more | 2021-08-03 |
| 10636650 | Argon addition to remote plasma oxidation | Hansel LO, Christopher S. Olsen, Eric Kihara Shono, Johanes S. Swenberg, Taewan Kim +1 more | 2020-04-28 |