Dogbone inlet cone profile for remote plasma oxidation chamber

Assignee

• Applied Materials

Inventors

• Vishwas Kumar Pandey (32 patents)
• Kartik Shah (68 patents)
• Christopher S. Olsen (89 patents)
• Agus Sofian Tjandra (26 patents)
• Hansel LO (13 patents)
• Eric Kihara Shono (29 patents)
• Hemantha Raju (7 patents)

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