Issued Patents All Time
Showing 51–61 of 61 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9464349 | Adjustable process spacing, centering, and improved gas conductance | Kirankumar Neelasandra SAVANDAIAH | 2016-10-11 |
| 9123511 | Process kit for RF physical vapor deposition | Donny Young | 2015-09-01 |
| 9096926 | Adjustable process spacing, centering, and improved gas conductance | Kirankumar Neelasandra SAVANDAIAH | 2015-08-04 |
| 9048190 | Methods and apparatus for processing substrates using an ion shield | Jeffrey Tobin, Bernard L. Hwang, Canfeng Lai, Wei Liu, Johanes F. Swenberg | 2015-06-02 |
| 8993458 | Methods and apparatus for selective oxidation of a substrate | Agus Sofian Tjandra, Christopher S. Olsen, Johanes F. Swenberg | 2015-03-31 |
| 8795488 | Apparatus for physical vapor deposition having centrally fed RF energy | Muhammad M. Rasheed, Michael S. Cox, Donny Young, Kirankumar Neelasandra SAVANDAIAH, Alan A. Ritchie | 2014-08-05 |
| 8668815 | Process kit for RF physical vapor deposition | Donny Young | 2014-03-11 |
| 8580092 | Adjustable process spacing, centering, and improved gas conductance | Kirankumar Neelasandra SAVANDAIAH | 2013-11-12 |
| 8435392 | Encapsulated sputtering target | Xianmin Tang, Vijay Parhke, Rongjun Wang | 2013-05-07 |
| 8133368 | Encapsulated sputtering target | Xianmin Tang, Vijay Parhke, Rongjun Wang | 2012-03-13 |
| 8070925 | Physical vapor deposition reactor with circularly symmetric RF feed and DC feed to the sputter target | Daniel J. Hoffman, Ying Rui, Karl M. Brown, John Pipitone | 2011-12-06 |