Issued Patents All Time
Showing 26–50 of 61 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10948353 | Thermal processing chamber with low temperature control | Samuel C. Howells, Wolfgang Aderhold, Leonid M. Tertitski, Michael S. Liu, Dongming Iu +2 more | 2021-03-16 |
| 10837122 | Method and apparatus for precleaning a substrate surface prior to epitaxial growth | Christopher S. Olsen, Theresa Kramer Guarini, Jeffrey Tobin, Peter Stone, Chi-Wei Lo +1 more | 2020-11-17 |
| 10770272 | Plasma-enhanced anneal chamber for wafer outgassing | Matthew D. Scotney-Castle, Norman L. Tam, Matthew Spuller, Kong CHAN, Dongming Iu | 2020-09-08 |
| 10763141 | Non-contact temperature calibration tool for a substrate support and method of using the same | Niraj Merchant, Mehran Behdjat, Dietrich Gage, Christopher Dao, Binh Minh Nguyen +2 more | 2020-09-01 |
| 10763090 | High pressure RF-DC sputtering and methods to improve film uniformity and step-coverage of this process | Adolph Miller Allen, Zhigang Xie, Muhammad M. Rasheed, Rongjun Wang, Xianmin Tang +8 more | 2020-09-01 |
| 10741428 | Semiconductor processing chamber | Aaron Muir Hunter, Mehran Behdjat, Niraj Merchant, Douglas R. McAllister, Dongming Iu +1 more | 2020-08-11 |
| 10689757 | Gas injection apparatus with heating channels | Agus Sofian Tjandra, Emre Cuvalci | 2020-06-23 |
| 10636650 | Argon addition to remote plasma oxidation | Hansel LO, Christopher S. Olsen, Eric Kihara Shono, Johanes S. Swenberg, Erika HANSEN +1 more | 2020-04-28 |
| 10626500 | Showerhead design | Kartik Shah, Chaitanya A. PRASAD, Kevin Joseph Bautista, Jeffrey Tobin, Umesh M. Kelkar | 2020-04-21 |
| 10571337 | Thermal cooling member with low temperature control | Samuel C. Howells, Wolfgang Aderhold, Leonid M. Tertitski, Michael S. Liu, Dongming Iu +2 more | 2020-02-25 |
| 10535513 | Apparatus and methods for backside passivation | Jeffrey Tobin | 2020-01-14 |
| 10428441 | Method and apparatus for precleaning a substrate surface prior to epitaxial growth | Christopher S. Olsen, Theresa Kramer Guarini, Jeffrey Tobin, Peter Stone, Chi-Wei Lo +1 more | 2019-10-01 |
| 10290504 | Plasma treating a process chamber | Wei Liu, Theresa Kramer Guarini, Huy Q. Nguyen, Malcolm J. Bevan, Houda Graoui +3 more | 2019-05-14 |
| 10221483 | Showerhead design | Kartik Shah, Chaitanya A. PRASAD, Kevin Joseph Bautista, Jeffrey Tobin, Umesh M. Kelkar | 2019-03-05 |
| 10211046 | Substrate support ring for more uniform layer thickness | Heng Pan, Christopher S. Olsen | 2019-02-19 |
| 10049881 | Method and apparatus for selective nitridation process | Matthew S. Rogers, Roger Curtis, Ken Kaung Lai, Bernard L. Hwang, Jeffrey Tobin +2 more | 2018-08-14 |
| 10020187 | Apparatus and methods for backside passivation | Jeff Tobin | 2018-07-10 |
| 9978569 | Adjustable process spacing, centering, and improved gas conductance | Kirankumar Neelasandra SAVANDAIAH | 2018-05-22 |
| 9869017 | H2/O2 side inject to improve process uniformity for low temperature oxidation process | Agus Sofian Tjandra, Christopher S. Olsen, Emre Cuvalci | 2018-01-16 |
| 9831091 | Plasma treating a process chamber | Wei Liu, Theresa Kramer Guarini, Huy Q. Nguyen, Malcolm J. Bevan, Houda Graoui +3 more | 2017-11-28 |
| 9773692 | In-situ removable electrostatic chuck | Michael S. Cox, Steven V. Sansoni | 2017-09-26 |
| 9683308 | Method and apparatus for precleaning a substrate surface prior to epitaxial growth | Christopher S. Olsen, Theresa Kramer Guarini, Jeffrey Tobin, Peter Stone, Chi-Wei Lo +1 more | 2017-06-20 |
| D790039 | Showerhead for a semiconductor processing chamber | Kong CHAN, Aaron Miller | 2017-06-20 |
| 9514968 | Methods and apparatus for selective oxidation of a substrate | Agus Sofian Tjandra, Christopher S. Olsen, Johanes S. Swenberg | 2016-12-06 |
| 9508584 | In-situ removable electrostatic chuck | Michael S. Cox, Steven V. Sansoni | 2016-11-29 |