Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9169554 | Wafer carrier track | Gang He, Gregg Higashi, Khurshed Sorabji, Andreas Hegedus | 2015-10-27 |
| 8985911 | Wafer carrier track | Gang He, Gregg Higashi, Khurshed Sorabji, Andreas Hegedus | 2015-03-24 |
| 8859042 | Methods for heating with lamps | Gang He, Gregg Higashi, Khurshed Sorabji, Andreas Hegedus | 2014-10-14 |
| 8852696 | Method for vapor deposition | Gang He, Gregg Higashi, Khurshed Sorabji, Andreas Hegedus | 2014-10-07 |
| 8602707 | Methods and apparatus for a chemical vapor deposition reactor | Gang He, Gregg Higashi, Khurshed Sorabji, Andreas Hegedus, Melissa Archer +2 more | 2013-12-10 |
| 7888240 | Method of forming phase change memory devices in a pulsed DC deposition chamber | Kuo-Wei Chang, Sean Lee, Chong Wee Lim | 2011-02-15 |