Issued Patents All Time
Showing 26–50 of 52 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9508375 | Modification of magnetic properties of films using ion and neutral beam implantation | Majeed A. Foad | 2016-11-29 |
| 9508576 | Process equipment architecture | Jacob Newman, Dinesh Kanawade, Miriam Schwartz, Michael Thomas Haag | 2016-11-29 |
| 9429248 | Process chamber gas flow apparatus, systems, and methods | Chandrakant M. Sapkale, Karuppasamy Muthukamtchi, Jeffrey C. Hudgens, Penchala N. Kankanala | 2016-08-30 |
| 9390950 | Rapid thermal processing chamber with micro-positioning system | Khurshed Sorabji, Joseph M. Ranish, Wolfgang Aderhold, Aaron Muir Hunter, Blake Koelmel +1 more | 2016-07-12 |
| 9296105 | Vibration-controlled substrate handling robots, systems, and methods | Alex Minkovich, Jeffrey C. Hudgens, Brendan Till | 2016-03-29 |
| 9147592 | Linked vacuum processing tools and methods of using the same | Eric A. Englhardt, Steve Szudarski, Andrew Scott Cornelius, Amitabh Puri, Michael R. Rice +5 more | 2015-09-29 |
| 9029242 | Damage isolation by shaped beam delivery in laser scribing process | James M. Holden, Todd Egan | 2015-05-12 |
| 8900889 | Rapid thermal processing chamber with micro-positioning system | Khurshed Sorabji, Joseph M. Ranish, Wolfgang Aderhold, Aaron Muir Hunter, Blake Koelmel +1 more | 2014-12-02 |
| 8894344 | Vertical wafer buffering system | Jacob Newman | 2014-11-25 |
| 8880210 | Methods and apparatus for processing substrates using model-based control | Keith Brian Porthouse, John W. Lane, Mariusch Gregor, Michael R. Rice, Alex Minkovich +2 more | 2014-11-04 |
| 8724976 | Use of infrared camera for real-time temperature monitoring and control | Stephen Moffatt, Kailash Kiran Patalay, David K. Carlson | 2014-05-13 |
| 8425977 | Substrate processing chamber with off-center gas delivery funnel | Son T. Nguyen | 2013-04-23 |
| 8419855 | Substrate processing chamber with off-center gas delivery funnel | Son T. Nguyen | 2013-04-16 |
| 8317449 | Multiple substrate transfer robot | Jacob Newman, Dinesh Kanawade | 2012-11-27 |
| 8314371 | Rapid thermal processing chamber with micro-positioning system | Khurshed Sorabji, Joseph M. Ranish, Wolfgang Aderhold, Aaron Muir Hunter, Blake Koelmel +1 more | 2012-11-20 |
| 8150242 | Use of infrared camera for real-time temperature monitoring and control | Stephen Moffatt, Kailash Kiran Patalay, David K. Carlson | 2012-04-03 |
| 8104951 | Temperature uniformity measurements during rapid thermal processing | Wolfgang Aderhold, Andreas Hegedus | 2012-01-31 |
| 7833351 | Batch processing platform for ALD and CVD | Aaron P. Webb, Adam Brailove, Joseph Yudovsky, Andrew J. Constant, Efrain Quiles +3 more | 2010-11-16 |
| 7748542 | Batch deposition tool and compressed boat | Joseph Yudovsky, Robert C. Cook | 2010-07-06 |
| 5801940 | Fault-tolerant HVAC system | Robert M. Russ, William W. Bassett, Charles A. Glorioso, Larry A. Lincoln | 1998-09-01 |
| 5772501 | Indoor environmental conditioning system and method for controlling the circulation of non-conditioned air | Robert M. Russ, Larry A. Lincoln, Thomas L. Webster | 1998-06-30 |
| 5720743 | Thermally insulating surgical probe | John C. Bischof, John Hulbert | 1998-02-24 |
| 5706190 | Fault-tolerant HVAC system | Robert M. Russ, Larry A. Lincoln | 1998-01-06 |
| 5648722 | Apparatus and method for determining the state of an electrical switch within an HVAC system | Jack Francis Hammons | 1997-07-15 |
| 5602758 | Installation link-up procedure | Larry A. Lincoln, Robert M. Russ, William W. Bassett, Thomas L. Webster | 1997-02-11 |