Issued Patents All Time
Showing 26–34 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8390980 | Electrostatic chuck assembly | Cheng-Hsiung Tsai, Shambhu N. Roy, Karl M. Brown, Vijay D. Parkhe, Hari Ponnekanti | 2013-03-05 |
| 7589950 | Detachable electrostatic chuck having sealing assembly | Vijay D. Parkhe, Cheng-Tsiung Tsai | 2009-09-15 |
| 6469283 | Method and apparatus for reducing thermal gradients within a substrate support | Vincent E. Burkhart, Michael Sugarman, Anthony Chih-Tung Chan | 2002-10-22 |
| D425919 | Electrostatic chuck with improved spacing mask and workpiece detection device | Vincent E. Burkhart, Allen Flanigan | 2000-05-30 |
| D420023 | Electrostatic chuck with improved spacing mask and workpiece detection device | Allen Flanigan, Vincent E. Burkhart | 2000-02-01 |
| D420022 | Electrostatic chuck with improved spacing and charge migration reduction mask | Vincent E. Burkhart, Allen Flanigan | 2000-02-01 |
| 5886865 | Method and apparatus for predicting failure of an eletrostatic chuck | Vijay D. Parkhe, Vincent E. Burkhart | 1999-03-23 |
| D407073 | Electrostatic chuck with improved spacing and charge migration reduction mask | Vincent E. Burkhart, Allen Flanigan | 1999-03-23 |
| D406852 | Electrostatic chuck with improved spacing mask and workpiece detection device | Vincent E. Burkhart, Allen Flanigan | 1999-03-16 |