Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10197385 | Intelligent hardstop for gap detection and control mechanism | Somesh Khandelwal, Garry K. Kwong, Joseph Yudovsky | 2019-02-05 |
| 10196741 | Wafer placement and gap control optimization through in situ feedback | Abraham Ravid, Alex Minkovich, Somesh Khandelwal, Joseph Yudovsky, Todd Egan | 2019-02-05 |
| 9765434 | Apparatus for susceptor temperature verification and methods of use | Joseph Yudovsky | 2017-09-19 |
| 9721757 | Elongated capacitively coupled plasma source for high temperature low pressure environments | John C. Forster, Joseph Yudovsky, Garry K. Kwong, Tai T. Ngo, Kenneth S. Collins +1 more | 2017-08-01 |
| 9663859 | Intelligent hardstop for gap detection and control mechanism | Somesh Khandelwal, Garry K. Kwong, Joseph Yudovsky | 2017-05-30 |
| 9617640 | Apparatus and methods for injector to substrate gap control | Joseph Yudovsky, Kaushal Gangakhedkar | 2017-04-11 |
| 9355819 | Elongated capacitively coupled plasma source for high temperature low pressure environments | John C. Forster, Joseph Yudovsky, Garry K. Kwong, Tai T. Ngo, Kenneth S. Collins +1 more | 2016-05-31 |
| 8459293 | Ampoule with integrated hybrid valve | — | 2013-06-11 |
| 7921803 | Chamber components with increased pyrometry visibility | Joseph Yudovsky, Brendan McDougall, Ravi Jallepally, Yi-Chiau Huang, Maitreyee Mahajani +1 more | 2011-04-12 |
| 4815072 | Switching arrangements for digital telecommunications exchange systems | Martin J. Linda | 1989-03-21 |