Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9922860 | Apparatus and methods for wafer chucking on a susceptor for ALD | Joseph Yudovsky | 2018-03-20 |
| 9617640 | Apparatus and methods for injector to substrate gap control | Joseph Yudovsky, Kevin Griffin | 2017-04-11 |
| 9103876 | Automatic probe configuration station and method therefor | Kent Nguyen, David Baldwin, Nile Alexander Light, Steve Aochi, Yan Wang +7 more | 2015-08-11 |
| 7468611 | Continuous linear scanning of large flat panel media | Kent Nguyen, Eric L. Thompson, Hai Tran, Robert Barnett, Daniel Toet +3 more | 2008-12-23 |