Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Methods and apparatus for cooling a substrate support

Methods and apparatus for cooling a substrate support

US Patent 12232299 · Granted Feb 18, 2025

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Modular multi-chamber processing tool having link chamber for ultra high vacuum 2025
Linear actuated 3 way spool valve with constant total flow2024
Method and apparatus for non line-of-sight doping2023
Cryogenic ferrofluid sealed rotary union2020
Method and apparatus for non line-of-sight doping2020
Gas systems and methods for chamber ports2019
Platen support structure2018
System and apparatus for holding a substrate over wide temperature range2016
Wafer platen thermosyphon cooling system2016
Gas apparatus, systems, and methods for chamber ports2016
Gas coupled probe for substrate temperature measurement2016
Technique for limiting transmission of fault current2016