Issued Patents All Time
Showing 26–50 of 212 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11667575 | Erosion resistant metal oxide coatings | Xiaowei Wu, Jennifer Y. Sun | 2023-06-06 |
| 11640917 | Ground electrode formed in an electrostatic chuck for a plasma processing chamber | Vijay D. Parkhe | 2023-05-02 |
| 11631605 | Sealed substrate carriers and systems and methods for transporting substrates | Jeffrey C. Hudgens | 2023-04-18 |
| 11621182 | Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing | Devendra Channappa Holeyannavar, Sandesh Doddamane Ramappa, Dean C. Hruzek, Jeffrey A. Brodine | 2023-04-04 |
| 11583816 | Gas distribution plate for thermal deposition | Jared Ahmad Lee, Sanjeev Baluja, Joseph AuBuchon, Dhritiman Subha Kashyap | 2023-02-21 |
| 11581203 | Systems for integrating load locks into a factory interface footprint space | Jacob Newman, Andrew J. Constant, Paul B. Reuter, Shay Assaf, Sushant S. Koshti | 2023-02-14 |
| 11576264 | Electronic device manufacturing system | Jeffrey C. Hudgens | 2023-02-07 |
| D973737 | Mainframe of substrate processing system | Michael Kuchar, Travis Morey, Adam J. Wyatt, Ofer Amir | 2022-12-27 |
| D973116 | Mainframe of substrate processing system | Michael Kuchar, Travis Morey, Adam J. Wyatt, Ofer Amir | 2022-12-20 |
| 11520358 | Gas-pulsing-based shared precursor distribution system and methods of use | Joseph AuBuchon, Sanjeev Baluja, Ashley M. Okada, Alexander Fernandez, Ming Xu +4 more | 2022-12-06 |
| 11479855 | Spatial wafer processing with improved temperature uniformity | Joseph AuBuchon, Sanjeev Baluja, Dhritiman Subha Kashyap, Jared Ahmad Lee, Tejas Ulavi | 2022-10-25 |
| 11456197 | Systems and methods for providing maintenance access to electronic device manufacturing tools | Juan Carlos Rocha-Alvarez, Jeffrey C. Hudgens | 2022-09-27 |
| 11424104 | Plasma reactor with electrode filaments extending from ceiling | Kenneth S. Collins, Kartik Ramaswamy, James D. Carducci | 2022-08-23 |
| 11393710 | Wafer edge ring lifting solution | Yogananda Sarode Vishwanath, Sunil Srinivasan, Rajinder Dhindsa, Steven E. Babayan, Olivier Luere +2 more | 2022-07-19 |
| 11355321 | Plasma reactor with electrode assembly for moving substrate | Kenneth S. Collins, Kartik Ramaswamy, James D. Carducci | 2022-06-07 |
| 11332827 | Gas distribution plate with high aspect ratio holes and a high hole density | Sumit Agarwal, Sanjeev Baluja, Chad Peterson | 2022-05-17 |
| 11328938 | Substrate processing apparatus and methods with factory interface chamber filter purge | — | 2022-05-10 |
| 11244846 | Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing | Jeffrey C. Hudgens, Karuppasamy Muthukamatchi, Nir Merry | 2022-02-08 |
| 11220747 | Complementary pattern station designs | Joseph AuBuchon, Sanjeev Baluja, Arkaprava Dan, Hanhong Chen | 2022-01-11 |
| 11195734 | Dual load lock chamber | — | 2021-12-07 |
| 11180847 | Atomic layer deposition coatings for high temperature ceramic components | Xiaowei Wu, Jennifer Y. Sun | 2021-11-23 |
| 11169547 | Gas-pulsing-based shared precursor distribution system and methods of use | Joseph AuBuchon, Sanjeev Baluja, Ashley M. Okada, Alexander Fernandez, Ming Xu +4 more | 2021-11-09 |
| 11114284 | Plasma reactor with electrode array in ceiling | Kenneth S. Collins, Kartik Ramaswamy, James D. Carducci, Shahid Rauf, Kallol Bera | 2021-09-07 |
| 11110425 | Gas distribution plate for thermal deposition | Jared Ahmad Lee, Sanjeev Baluja, Joseph AuBuchon, Dhritiman Subha Kashyap | 2021-09-07 |
| 11098404 | Multi-station chamber lid with precise temperature and flow control | Dhritiman Subha Kashyap, Gopu Krishna, Sanjeev Baluja | 2021-08-24 |