Issued Patents All Time
Showing 76–100 of 212 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10359743 | Substrate processing systems, apparatus, and methods with substrate carrier and purge chamber environmental controls | Dean C. Hruzek | 2019-07-23 |
| 10312056 | Distributed electrode array for plasma processing | Kenneth S. Collins, Kartik Ramaswamy, James D. Carducci, Yue Guo, Olga Regelman | 2019-06-04 |
| 10217650 | Methods and apparatus for substrate edge cleaning | James M. Holden, Song-Moon Suh, Todd Egan, Kalyanjit Ghosh, Leon Volfovski +1 more | 2019-02-26 |
| 10056274 | System and method for forming a sealed chamber | Paul B. Reuter, William (Ty) Weaver, Travis Morey, Natan Schlimoff, Igor Krivts (Krayvitz) +3 more | 2018-08-21 |
| 9997328 | System and method for forming a sealed chamber | Ron Naftali, Natan Schlimoff, Igor Krivts (Krayvitz), Israel Avneri, Yoram Uziel +3 more | 2018-06-12 |
| 9986598 | Temperature control apparatus including groove-routed optical fiber heating, substrate temperature control systems, electronic device processing systems, and processing methods | Matthew J. Busche, Wendell Glenn Boyd, Jr., Dmitry A. Dzilno, Vijay D. Parkhe, Leon Volfovski | 2018-05-29 |
| 9905447 | Sealed substrate carriers and systems and methods for transporting substrates | Jeffrey C. Hudgens | 2018-02-27 |
| 9831111 | Apparatus and method for measurement of the thermal performance of an electrostatic wafer chuck | Matthew J. Busche, Vijay D. Parkhe | 2017-11-28 |
| 9717147 | Electronic device manufacturing system | Jeffrey C. Hudgens | 2017-07-25 |
| 9698041 | Substrate temperature control apparatus including optical fiber heating, substrate temperature control systems, electronic device processing systems, and methods | Matthew J. Busche, Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Leon Volfovski | 2017-07-04 |
| 9587749 | Slit valve with a pressurized gas bearing | Natan Schlimoff, Igor Krivts (Krayvitz), Israel Avneri, Yoram Uziel, Erez Admoni +2 more | 2017-03-07 |
| 9538583 | Substrate support with switchable multizone heater | Leon Volfovski, Mayur Govind Kulkarni, Alex Minkovich | 2017-01-03 |
| 9502294 | Method and system for wafer level singulation | Klaus Schuegraf, Seshadri Ramaswami, Mohsen Salek, Claes Bjorkman | 2016-11-22 |
| 9443714 | Methods and apparatus for substrate edge cleaning | James M. Holden, Song-Moon Suh, Todd Egan, Kalyanjit Ghosh, Leon Volfovski +1 more | 2016-09-13 |
| 9405287 | Apparatus and method for optical calibration of wafer placement by a robot | Abraham Ravid, Todd Egan, Eran Weiss, Izya Kremerman | 2016-08-02 |
| 9177842 | Degassing apparatus adapted to process substrates in multiple tiers with second actuator | Eric A. Englhardt, Richard Giljum, Jeffrey C. Hudgens, Igor Kogan, Sushant S. Koshti | 2015-11-03 |
| 9147592 | Linked vacuum processing tools and methods of using the same | Eric A. Englhardt, Steve Szudarski, Andrew Scott Cornelius, Amitabh Puri, Jeffrey C. Hudgens +5 more | 2015-09-29 |
| 9111980 | Gas exhaust for high volume, low cost system for epitaxial silicon deposition | David K. Carlson, Kartik Shah, Kashif Maqsood, Pravin K. Narwankar | 2015-08-18 |
| 9004107 | Methods and apparatus for enhanced gas flow rate control | Mariusch Gregor, John W. Lane, Justin Hough | 2015-04-14 |
| 8991785 | Methods and apparatus for sealing a slit valve door | Angela Rose Sico, James D. Strassner | 2015-03-31 |
| 8880210 | Methods and apparatus for processing substrates using model-based control | Keith Brian Porthouse, John W. Lane, Mariusch Gregor, Nir Merry, Alex Minkovich +2 more | 2014-11-04 |
| 8870512 | Sealed substrate carriers and systems and methods for transporting substrates | Jeffrey C. Hudgens | 2014-10-28 |
| 8796589 | Processing system with the dual end-effector handling | Efrain Quiles, Mehran Behdjat, Robert B. Lowrance, Brent Vopat | 2014-08-05 |
| 8580615 | Method and system for wafer level singulation | Klaus Schuegraf, Seshadri Ramaswami, Mohsen Salek, Claes Bjorkman | 2013-11-12 |
| 8550031 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2013-10-08 |